The PFLOW airflow sensor:
2015-07-20 03:21:04, Angst+Pfister Sensors and Power AG PEWATRON launches the new MEMS-based mass flow sensor PFLOW . The airflow sensor makes use of the latest innovations in MEMS technology and microelectronics and is characterized by a very high resistance to clogging and pressure shocks. Innovative MEMS technology enables thermal insulation without fragile, thin membranes or surface recesses. The sensor also impresses with very high sensitivity at low air flows. It is therefore perfect for medical and other demanding applications in the process industry.
The sensor chip consists of two thermopiles positioned symmetrically in each flow direction (up and down) of a heating element that heats the hot solder joints. To ensure the greatest possible sensitivity, each of the thermopiles consists of twenty heat sensors arranged in series. When an air stream passes the sensor chip, the thermopiles generate an output voltage that is proportional to the temperature gradient between the hot and cold contact points (asymmetric) due to the Seebeck effect. When the medium is static (no air flow), the temperature profile is symmetrical in both directions (up and down).
Five standard measurement ranges between 0-10 SCCM and 0-2000 SCCM are offered, as well as specific ranges between 10 and 2000 SCCM upon customer request. The PFLOW provides accuracy greater than +/-2.0% FS, and the temperature-compensated analog output (0-50°C) is also highly linear to the airflow. The analog output voltage is between 1 and 5 VDC and the sensor is resistant to water condensation. Its response time is also very low at 1-3 ms.
The sensor chip consists of two thermopiles positioned symmetrically in each flow direction (up and down) of a heating element that heats the hot solder joints. To ensure the greatest possible sensitivity, each of the thermopiles consists of twenty heat sensors arranged in series. When an air stream passes the sensor chip, the thermopiles generate an output voltage that is proportional to the temperature gradient between the hot and cold contact points (asymmetric) due to the Seebeck effect. When the medium is static (no air flow), the temperature profile is symmetrical in both directions (up and down).
Five standard measurement ranges between 0-10 SCCM and 0-2000 SCCM are offered, as well as specific ranges between 10 and 2000 SCCM upon customer request. The PFLOW provides accuracy greater than +/-2.0% FS, and the temperature-compensated analog output (0-50°C) is also highly linear to the airflow. The analog output voltage is between 1 and 5 VDC and the sensor is resistant to water condensation. Its response time is also very low at 1-3 ms.
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