New interferometer for high-precision wafer thickness measurement

These each consist of a compact sensor and a controller, which is housed in a robust industrial-grade housing.An active temperature control integrated in the controller ensures high stability of the measurement.

The interferometer is available as either a thickness or a multipeak thickness measurement system. The multipeak thickness measurement system can measure the thickness of up to five layers, e.g. wafer thickness, air gap, foiling and coatings >50 µm. For thickness measurements in difficult environmental conditions, the IMS5420IP67 controller is available with IP67 and stainless steel housing as well as matching fiber optics and sensors.