SEMIFLOW CO.65
Item number: Ultrasonic Clamp-On Flow Sensor Applications Chemical industrySemiconductor industry
Price on request
Delivery time:Delivery time on request
SEMIFLOW CO.65 non-contact clamp-on flow sensors are ideal to measure abrasive, adherent, corrosive, and ultra-pure liquids on rigid plastic tubes and pipes used in the semiconductor industry.
Equipped with an integrated electronic unit, they function as a complete flow meter in the size of a small transducer without an external board or transmitter.
Equipped with an integrated electronic unit, they function as a complete flow meter in the size of a small transducer without an external board or transmitter.
Attributes of SEMIFLOW CO.65
May differ from supplier data
Basic data
Accuracy (%) 2 %
Flow rate 0 to 400 l/min
Measurement process Ultrasonics Clamp-on flowmeter
Additional measurement possibilities Flow
Measured medium Liquids Liquid mixtures Sound transparent liquids
Product environmental influences (protection class/temperature)
Protection class IP 65
Signal inputs/outputs and interfaces
Additional signal outputs Frequency output
Interfaces Modbus RS-485
Signal output 0…20 mA 4…20 mA
Switching output NPN PNP Push-pull
Housing / Design / Mechanical data / Materials
Sensor design Clamp on
Housing material (see data sheet for more information) PMMA (measurement channel) Silicone (inlay)
Application-specific features
Application-specific features Contactless measurement No coupling medium required Compact sensor design Show all Wear and maintenance-free No dead volume Fast and lag-free measurement Any installation position of the sensor Sterilizable Measurement of pulsating flows possible
Process connection
Process connection/installation free on the hose in any position, suspended or as fixed installation Clamp connection
Customized versions
Customized versions Voltage supply Signal output Channel width
Approvals / Certificates / Performance level / Integrity level
Approvals/certificates/test marks RoHS/REACH IEC 61157 (acoustic emission) 2014/30/EU (EMC directive)
Electrical data / Signal connections
Electrical connection 8-pin connector (binder 720 male)
Typical applications
Typ. applications Equipment for wafer cleaning Lithography equipment Mixing plants Show all Chemical supply systems Slurry Line