Applications Smart FactoryMechanical engineering & Plant constructionMetal industrySemiconductor industry

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The IMS5400-DS white light interferometer is used for absolute distance measurement with nanometer precision. Unlike conventional interferometers, the IMS5400-DS also enables stable measurement of step profiles. The controller features intelligent evaluation and enables absolute measurements with nanometer accuracy at a relatively large base distance. Compared to other absolute measuring optical systems, the IMS5400-DS thus offers an unsurpassed combination of accuracy, measuring range and base distance. With multi-peak distance measurement on transparent objects, up to 14 distance values are evaluated simultaneously. This can be used, for example, to determine the distance between glass and a carrier plate. In addition, the controller can calculate the glass thickness from the distance values.