Applications Smart FactoryMechanical engineering & Plant constructionMetal industrySemiconductor industry

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The IMS5600-DS white-light interferometer is used for high-precision displacement and distance measurement. The system provides absolute measured values and can therefore also be used for distance measurement of step profiles. Thanks to the absolute measurement, the scanning of stages takes place with high signal stability. When measuring on moving objects, the height differences of landings, steps and depressions can thus be reliably detected. The measurement system provides sub-nanometer resolution while maintaining a large base distance relative to the measurement range. With multi-peak distance measurement on transparent objects, up to 14 distance values are evaluated simultaneously. This can be used, for example, to determine the distance between glass and a carrier plate. The controller can then calculate the glass thickness from the distance values.